nano3DX_cover BG dark-min nano3DX


High-resolution for submicron 3D imaging High-contrast for soft/organic materials High-speed for maximum productivity

True submicron CT scanner with contrast-enhancing X-ray anode

What is nano3DX?

Rigaku nano3DX is a true submicron resolution CT (computed tomography) scanner. The parallel beam geometry combined with an ultra-bright 1200 W rotating anode X-ray source enhances the contrast of soft materials, which are normally difficult to image using high-energy X-ray sources. The X-ray anode can be selected from Cr (5.4 keV), Cu (8 keV), or Mo (17 keV) for low-energy and pseudo-monochromatic radiation to maximize the contrast for the given sample material and size. With the highest magnification lens, the nano3DX can achieve 325 nm voxel resolution and true submicron (700 nm) spatial resolution.

nano3DX features:

  • Parallel beam geometry for true submicron resolution
  • Selectable pseudo-monochromatic X-ray radiations
  • Ultra-bright 1200 W X-ray source and sCMOS for shorter scan time
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How do I achieve high resolution?

Rigaku nano3DX uses parallel beam geometry. This geometry uses an optical lens to magnify the sample image. It does not use the X-ray beam divergence and eliminates blurring caused by the X-ray focus size and drift. With the 20X magnification lens, you can achieve 325 nm voxel resolution and true submicron (700 nm) spatial resolution.

At this resolution, you can see individual carbon fibers (~7.5 um), the intricate structures of seeds, small insects, etc.

How do I change X-ray anodes?

Rigaku nano3DX is equipped with a dual-wavelength rotating anode X-ray generator, MicroMax-007 HF. The rotating X-ray anode is made of Cu, providing Cu characteristic radiation of 8 keV. Another anode material, Cr 5.4 keV, Mo 17 keV, or W for Bremsstrahlung radiation, can be added to the Cu anode to provide the second radiation. You can switch between two radiations with a simple click on the instrument control software.

You can image an even 5% density difference in organic materials by using optimized radiation and differentiate amorphous and crystalline phases, high- and low-density polyethylene, etc.

Rigaku nano3DX easy X-ray anode change
Rigaku nano3DX easy sample mount

Do I need to prepare my sample in a special way?

No, X-ray CT measurements require minimum to no sample preparation. As far as the sample size is close to the FOV (field of view), you can mount the sample on the sample stage with a small pin as is, and you are ready to run a CT scan.

Because X-ray CT experiments are done in the air and do not require conductivity on the sample as is the case for SEM (scanning electron microscopy), organic samples such as plants can be measured without a drying or coating process.

nano3DX Specifications

Compare this with other products.

Voxel resolution 325 nm — 10 um
Field of view (FOV) 0.66 — 20 mm
Maximum sample size 20 mm diameter x 40 mm height
Speed (shortest scan time) 30 sec
Geometry Parallel beam geometry
X-ray source 1200 W rotating anode micro source
X-ray energy Pseudo monochromatic sources: Cr (5.4 keV), Cu (8 keV), Mo (17 keV) | Traditional source: W operated at 60 kV
Lenses 1.25X, 2.5X, 5X, 10X, 20X
Detector High-resolution sCMOS
Detector pixel size 6.5 microns
Detector size 2560 x 2160 pixels
Dimensions 1300 (W) x 1880 (H) x 655(D) mm (PC, chiller, vacuum pump not included)
Weight Approx. 600 kg


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